CSW2026

Date

May 24, 2026
-
May 28, 2026

Location

Kumamoto-Jo Hall, Kumamoto, Japan

Topics

If you are interested in discussing our process capabilities, please visit our booth.

  1. Atomic Layer Etching (ALE) Systems — Highly controlled etching for precise, atomic-scale material removal critical for advanced III-V and wide-bandgap device processing.
  2. ICP Etching Systems — Versatile plasma etch tools offering high anisotropy and selectivity for compound semiconductor patterning and device fabrication.
  3. PECVD Systems — Plasma enhanced chemical vapor deposition platforms for conformal dielectric and passivation layers on compound semiconductor structures.
  4. R&D Process Tools — Equipment tailored for research environments focusing on novel material integration, prototyping, and process development.
  5. Surface Treatment Solutions — Advanced cleaning and surface conditioning tools for optimized interface and device performance.

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