Scientific Paper on Microfluidics Fabrication from Princeton University Using SAMCO DRIE System

October 1, 2015 Samco 2015 Customer, Microfluidics, Samco Customer Publication, Si DRIE, Silicon/Dielectrics Etch

Microfluidic chemical processing with on-chip washing by deterministic lateral displacement arrays with separator walls

Yu Chen1,2, Joseph D’Silva1,2, Robert H. Austin1,3 and James C. Sturm1,2
1 Princeton Institute for Science and Technology of Materials (PRISM), Princeton, New Jersey 08544, USA
2 Department of Electrical Engineering, Princeton University, Princeton, New Jersey 08544, USA
3 Department of Physics, Princeton University, Princeton, New Jersey 08544, USA
BIOMICROFLUIDICS 9, 054105 (2015)

Samco Silicon DRIE System at Princeton University was used for microchannel fabrication. Silicon Periodic Table

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