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  • Products
    • Deposition Systems
      • Atomic Layer Deposition (ALD) Systems
      • Anode PECVD Systems
      • Cathode PECVD Systems
    • Etching Systems
      • Atomic Layer Etching (ALE) Systems
      • Inductively Coupled Plasma (ICP) Etching Systems
      • Si Deep Reactive Ion Etching (DRIE) Systems
      • Reactive Ion Etching (RIE) – Plasma Etching Systems
      • Xenon Difluoride (XeF2) Etching Systems
    • Surface Treatment Systems
      • Aqua Plasma® Cleaners
      • Plasma Cleaning Systems
      • UV Ozone Cleaning Systems
  • Processes
    • Deposition
      • Atomic Layer Deposition (ALD)
      • Anode PECVD
      • Cathode PECVD
    • Etching
      • Atomic Layer Etching (ALE)
      • Compound Semiconductor Etching
      • Silicon Etching & DRIE
      • Metal/Dielectric Etching
      • Failure Analysis
    • Surface Treatment
      • Aqua Plasma®
      • Plasma Cleaning
      • UV Ozone Cleaning
  • Markets
  • News & Events
    • Events
    • News
    • Disclosure
    • Technical Reports
    • Interviews
    • Tutorials
  • About
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Tag Archives: Power Device

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Electric car on charging spot with solar panels and wind energy in front of landscape (Showing application of power devices using SiC Trench MOSFETs

New Approach for Trench Type SiC MOSFET

Technical reportsBy MeganMarch 7, 2019

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Disclosure
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