Indian Students from Kyoto University’s KU-STAR Program Visit Samco
Samco welcomed KU-STAR Program students from top Indian universities for a factory tour, tech talk, and cultural exchange during their academic stay in Kyoto.
Kyushu University – CSeDE: Professor Reiji Hattori
Professor Reiji Hattori Professor, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University Director, Center for Semiconductor and Device Ecosystem Research and Education (CSeDE), Kyushu University For this interview, we visited Professor Reiji Hattori at the Center for Semiconductor and Device Ecosystem Research and Education (CSeDE) on Kyushu University’s Chikushi Campus to learn about his research…
Samco Strengthens Collaboration with IIT Delhi, Advancing Japan-India Technology and Talent Exchange
Samco Inc. (TSE: 6387) has announced plans to strengthen its collaboration with the Indian Institute of Technology Delhi (IIT Delhi) in early 2025. This expanded partnership will focus on technology exchange in energy science and talent development, including the recruitment of graduates from IIT Delhi’s master’s and doctoral programs. On February 10, 2025, Samco Inc.…
Introduction of the Single-Wafer Aqua Plasma® System
Introduction Since its founding, our company has been developing and designing equipment with superior environmental, health, and safety (EHS) features. In 2016, we launched the Aqua Plasma® cleaner, which utilizes water as its primary material, characterized by being safe and environmentally friendly. The product has been well received by many customers. The Aqua Plasma® process…
Cornell University EMBA Students Visit Samco Inc. to Explore Innovation and Semiconductor Leadership in Japan
Kyoto, Japan – April 4, 2025 – Samco Inc. (TSE: 6387), was pleased to welcome a delegation of Executive MBA (EMBA) students from Cornell University’s SC Johnson College of Business as part of their “Leadership Course to Japan.” The visit provided a valuable opportunity for cross-cultural exchange and dialogue on innovation, technology, and global business…
MIT’s Dr. Tomás Palacios Visits Samco to Explore Future Microelectronics Innovations
Samco Inc. (TSE: 6387), was honored to host Dr. Tomás Palacios, Director of the Microsystems Technology Laboratories at MIT and Clarence J. LeBel Professor in Electrical Engineering and Computer Science, during his visit to discuss potential collaborations in research and development. His visit marks an exciting opportunity to explore advancements in microelectronics through innovative materials,…
Introduction to the 700°C High-Temperature PECVD System PD-101TC
Introduction Plasma-enhanced chemical vapor deposition (PECVD) systems were initially developed for low-temperature film deposition. However, recent diversification in research and development needs has led to a demand for systems capable of high-temperature film deposition. PECVD systems, a cornerstone of Samco, utilize silicon tetrahydride (SiH4) gas for silicon nitride (SiN) and silicon dioxide (SiO2) film deposition.…
What is Atomic Layer Deposition (ALD)?
Atomic Layer Deposition Tutorial: Introduction to ALD Atomic Layer Deposition (ALD) is a thin-film deposition technique that utilizes self-limiting surface chemical reactions to achieve precise layer-by-layer growth. By alternately introducing and exhausting two or more reactants into the reaction chamber, ALD enables excellent film thickness control, superior step coverage, and high conformality. As demand for…
Northwestern University – NUFAB: Nasir Basit, PhD.
Micro- and nanoscale device research, deposition and etching processes using RIE and PECVD for advanced structures.
ICP Etching Process for Realizing SiC Trench MOSFETs
Introduction One example of a 4H-SiC power device is the MOSFET (Metal Oxide Semiconductor Field Effect Transistor). While planar MOSFETs have been developed in the past, trench-type MOSFETs have attracted attention to meet demands for high efficiency, such as “low on-resistance.” Samco has been working on trench processing using ICP etching equipment, which is essential…