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    • Deposition Systems
      • Atomic Layer Deposition (ALD)
      • Anode PECVD
      • Cathode PECVD
    • Etching Systems
      • Atomic Layer Etching (ALE)
      • Inductively Coupled Plasma (ICP) Etching
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        • GaAs Etching
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Author Archives: Megan

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  2. Article author Megan

New hires visiting Taisei Weld

Visiting Samco’s Partner Companies

NewsBy MeganApril 27, 2026

New employees visited Taisei Weld and Ushikoshi to learn how precision welding and metal fabrication support Samco’s semiconductor systems.

Group photo with VCU EMBA Students

Virginia Commonwealth University EMBA Students Visit Samco for Global Business and Kyoto Management Insights

NewsBy MeganApril 17, 2026

VCU EMBA students visited Samco in Kyoto, exploring its history, semiconductor manufacturing processes, and unique Kyoto approach to business and management.

GaN Power Device

IMiF Expands GaN Research Capability for Power Devices with Samco ICP-RIE Platform

NewsBy MeganApril 14, 2026

Samco systems support IMiF’s GaN pilot line, enabling precise AlGaN/GaN etching and advancing wide bandgap semiconductor research in Europe.

Technical Report

Stable Device Isolation Processing for 6-Inch GaN-Based Power Devices

Technical reportsBy MeganMarch 11, 2026

GaN device isolation etching using ICP-RIE and endpoint detection enables uniform processing and stable multi-wafer semiconductor production.

Japanese flag and Denmark flag

DTU Selects Samco Plasma Etching System for Quantum Photonics Research

NewsBy MeganMarch 2, 2026

The Technical University of Denmark selects Samco’s RIE-400iP plasma etching system for quantum photonics research, enabling precise III-V processing for single-photon device development.

Professor Kataoka headshot

Innovation Center of NanoMedicine (iCONM): Professor Kazunori Kataoka

InterviewsBy MeganFebruary 26, 2026

Professor Kazunori Kataoka presents nanomachine-based drug delivery and the vision of “in-body hospitals” at the 2025 Samco Foundation lecture.

Discussion during the visit to ITRI, Taiwan (From left: Osamu Tsuji, Chairman, Samco Inc.; Pei-Zen Chang, President, ITRI; Jwu-Sheng Hu, Executive Vice President, ITRI)

Samco Strengthens Strategic Collaboration with ITRI Taiwan

NewsBy MeganFebruary 10, 2026

Samco expands partnership with ITRI Taiwan, focusing on semiconductor processing, silicon photonics, and chiplet integration through joint R&D efforts.

Chairman Osamu Tsuji Awarded Honorary Doctorate by Kyoto Institute of Technology

Chairman Osamu Tsuji Awarded Honorary Doctorate by Kyoto Institute of Technology

NewsBy MeganDecember 12, 2025

Samco Chairman Osamu Tsuji received an Honorary Doctorate from Kyoto Institute of Technology in recognition of his contributions to education and research.

Samco Now 131 Technical Report: Atomic-Level Etch Control - Introduction to Atomic Layer Etching (ALE) Systems

Atomic Layer Etching Control – Intro to ALE Systems

Technical reportsBy MeganOctober 10, 2025

Introducing Samco’s Atomic Layer Etching (ALE) systems, detailing precise low-bias control and fast gas switching for uniform, low-damage etching processes.

Photo of Professor Akiyoshi Baba from Kyutech

Kyushu Institute of Technology: Professor Akiyoshi Baba

InterviewsBy MeganOctober 9, 2025

Prof. Akiyoshi Baba shares insights on CMOS/MEMS research and managing Japan’s leading open-access semiconductor facility at Kyutech’s Iizuka Campus.

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