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Samco Inc.
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Products
Deposition Systems
Atomic Layer Deposition (ALD) Systems
Anode PECVD Systems
Cathode PECVD Systems
Etching Systems
Atomic Layer Etching (ALE) Systems
Inductively Coupled Plasma (ICP) Etching Systems
Si Deep Reactive Ion Etching (DRIE) Systems
Reactive Ion Etching (RIE) – Plasma Etching Systems
Xenon Difluoride (XeF2) Etching Systems
Surface Treatment Systems
Aqua Plasma® Cleaners
Plasma Cleaning Systems
UV Ozone Cleaning Systems
Processes
Deposition
Atomic Layer Deposition (ALD)
Anode PECVD
Cathode PECVD
Etching
Atomic Layer Etching (ALE)
Compound Semiconductor Etching
Silicon Etching & DRIE
Metal/Dielectric Etching
Failure Analysis
Surface Treatment
Aqua Plasma®
Plasma Cleaning
UV Ozone Cleaning
Markets
News & Events
Events
News
Disclosure
Technical Reports
Interviews
Tutorials
About
Company Overview
Global Locations
History
Contact
Product Info Request
Technical Support Request
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Events
SEMICON Europa 2025
Date
November 18, 2025
–
November 21, 2025
Location
Messe München | Munich, Germany
SEMICON West 2025
Date
October 7, 2025
–
October 9, 2025
Location
Phoenix Convention Center | Phoenix, Arizona
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Latest News
Simultaneous Double-sided Wafer Deposition via Plasma Enhanced ALD
Technical reports
July 31, 2025
Ohio State University Students Visit Samco Inc. Headquarters
News
July 21, 2025
Institute of Science Tokyo: Professor Yasuyuki Miyamoto
Interviews
July 7, 2025
Special Lecture on GaN Technology by Nagoya University Professor Jun Suda
News
June 17, 2025
Samco featured in TIME Magazine: Taking a Quantum Leap
News
June 12, 2025
Indian Students from Kyoto University’s KU-STAR Program Visit Samco
News
June 5, 2025
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