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  • Products
    • Deposition Systems
      • Atomic Layer Deposition (ALD) Systems
      • Anode PECVD Systems
      • Cathode PECVD Systems
    • Etching Systems
      • Atomic Layer Etching (ALE) Systems
      • Inductively Coupled Plasma (ICP) Etching Systems
      • Si Deep Reactive Ion Etching (DRIE) Systems
      • Reactive Ion Etching (RIE) – Plasma Etching Systems
      • Xenon Difluoride (XeF2) Etching Systems
    • Surface Treatment Systems
      • Aqua Plasma® Cleaners
      • Plasma Cleaning Systems
      • UV Ozone Cleaning Systems
  • Processes
    • Deposition
      • Atomic Layer Deposition (ALD)
      • Anode PECVD
      • Cathode PECVD
    • Etching
      • Atomic Layer Etching (ALE)
      • Compound Semiconductor Etching
      • Silicon Etching & DRIE
      • Metal/Dielectric Etching
      • Failure Analysis
    • Surface Treatment
      • Aqua Plasma®
      • Plasma Cleaning
      • UV Ozone Cleaning
  • Markets
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Daily Archives: April 28, 2023

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  4. 28

Aqua Plasma Boost® and AQ-2000BT: Excellent for Reducing Large Sized Samples of Oxidized Copper

Technical reportsBy MeganApril 28, 2023

Samco developed Aqua Plasma Boost® to enhance oxidized copper reduction using reducing gas and water vapor.

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