Scientific Paper on Silicon Photonic Circuit Fabrication from University of Delaware
Packaging and design of a heterogeneous dual laser chip for a widely tunable spectrally pure optical RF source
David W. Grund Jr., Garrett J. Schneider, Janusz Murakowski, and Dennis W. Prather
Electrical and Computer Engineering, University of Delaware, Newark, Delaware, USA
Optics Express (2014) 22, 17, pp. 19838-19849
For details of SiO2 PECVD process capabilities, please visit the page below.
SiO2 PECVD Process