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Samco Inc.
USA Website Next Gen
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Deposition Systems
Atomic Layer Deposition (ALD)
Anode PECVD
Cathode PECVD
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Atomic Layer Etching (ALE)
Inductively Coupled Plasma (ICP) Etching
Si Deep Reactive Ion Etching (DRIE)
Reactive Ion Etching (RIE) – Plasma Etching
Xenon Difluoride (XeF2) Etching
Surface Treatment Systems
Aqua Plasma®
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Deposition
Atomic Layer Deposition (ALD)
Anode PECVD
Cathode PECVD
Etching
Atomic Layer Etching (ALE)
Compound Semiconductor Etching
GaN Etching
GaAs Etching
InP Etching
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Products
Deposition Systems
Atomic Layer Deposition (ALD)
Anode PECVD
Cathode PECVD
Etching Systems
Atomic Layer Etching (ALE)
Inductively Coupled Plasma (ICP) Etching
Si Deep Reactive Ion Etching (DRIE)
Reactive Ion Etching (RIE) – Plasma Etching
Xenon Difluoride (XeF2) Etching
Surface Treatment Systems
Aqua Plasma®
Plasma Cleaning
UV Ozone Cleaning
Processes
Deposition
Atomic Layer Deposition (ALD)
Anode PECVD
Cathode PECVD
Etching
Atomic Layer Etching (ALE)
Compound Semiconductor Etching
GaN Etching
GaAs Etching
InP Etching
Silicon Etching & DRIE
Metal/Dielectric Etching
Failure Analysis
Surface Treatment
Aqua Plasma®
Plasma Cleaning
UV Ozone Cleaning
Markets
News & Events
Events
News
Disclosure
Technical Reports
Interviews
Tutorials
About
Company Overview
Global Locations
History
Contact
Product Info Request
Technical Support Request
Careers
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News & Events
Events
SEMICON Japan 2025
Date
December 17, 2025
–
December 19, 2025
Location
Tokyo Big Site
IWPSD 2025 (International Workshop on the Physics of Semiconductor Devices)
Date
December 15, 2025
–
December 18, 2025
Location
IIT Roorkee
All Events
Latest News
Atomic Layer Etching Control – Intro to ALE Systems
Technical reports
October 10, 2025
Kyushu Institute of Technology: Professor Akiyoshi Baba
Interviews
October 9, 2025
University of Adelaide to Install RIE-400iP-ALE as Australia’s First ALE System
News
October 1, 2025
Invited Lecture at IIT Delhi Delivered by Samco Inc. Founder Osamu Tsuji
News
September 13, 2025
Samco Inc. Completes Construction of New Advanced Technology Development Center
News
September 1, 2025
TOWA and Samco Successfully Host “Kyoto Day” Technical Seminar in New Delhi
News
September 1, 2025
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