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  • Products
    • Deposition Systems
      • Atomic Layer Deposition (ALD)
      • Anode PECVD
      • Cathode PECVD
    • Etching Systems
      • Atomic Layer Etching (ALE)
      • Inductively Coupled Plasma (ICP) Etching
      • Si Deep Reactive Ion Etching (DRIE)
      • Reactive Ion Etching (RIE) – Plasma Etching
      • Xenon Difluoride (XeF2) Etching
    • Surface Treatment Systems
      • Aqua Plasma®
      • Plasma Cleaning
      • UV Ozone Cleaning
  • Processes
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      • Atomic Layer Deposition (ALD)
      • Anode PECVD
      • Cathode PECVD
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        • GaN Etching
        • GaAs Etching
        • InP Etching
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Yearly Archives: 2024

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  2. 2024

RIKEN: Dr. Takuo Tanaka

InterviewsBy MeganJuly 26, 2024

Optical metamaterials research, including nanostructures for light manipulation and high-sensitivity molecular detection, using Samco’s RIE-400iP.

RIE-400iP with technician

Samco Announces Sale of Advanced Etching Systems to III-V Lab in Europe

News, News & EventsBy MeganJuly 19, 2024

Samco announces the sale of two RIE-400iP ICP-RIE systems to France-based III-V Lab to support advanced III-V semiconductor and silicon integration research.

FORTUNE Magazine: Kyoto’s Semiconductor Success

News, News & EventsBy MeganJune 24, 2024

Samco is featured in FORTUNE Businessweek on Kyoto’s semiconductor strength, highlighting Samco’s global growth, R&D expansion, and innovation rooted in Kyoto.

Dr. Hiroto Sekiguchi

Toyohashi University of Technology: Dr. Hiroto Sekiguchi

InterviewsBy MeganApril 12, 2024

Bio-implantable microLED devices using RIE-200NL and PD-220NL systems.

Introduction of the Three-Chamber CVD System “PD-2203LC”

Technical reportsBy MeganFebruary 14, 2024

Overview of three-chamber CVD system “PD-2203LC”, enabling stable SiN/SiO2 deposition with flexible frequency options for research and production.

RIE-10NR Achieves Sales Milestone of 500 Units

News, News & EventsBy MeganJanuary 16, 2024

Samco’s RIE-10NR CCP-RIE system surpasses 500 units shipped, marking a major milestone for a widely adopted etching tool in global research and development.

Masataka HIGASHIWAKI, Ph.D.

Osaka Metropolitan University: Professor Masataka Higashiwaki, Ph.D.

InterviewsBy MeganJanuary 12, 2024

Research on Ga₂O₃ devices using RIE-200NL and other systems.

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