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  • Products
    • Deposition Systems
      • Atomic Layer Deposition (ALD)
      • Anode PECVD
      • Cathode PECVD
    • Etching Systems
      • Atomic Layer Etching (ALE)
      • Inductively Coupled Plasma (ICP) Etching
      • Si Deep Reactive Ion Etching (DRIE)
      • Reactive Ion Etching (RIE) – Plasma Etching
      • Xenon Difluoride (XeF2) Etching
    • Surface Treatment Systems
      • Aqua Plasma®
      • Plasma Cleaning
      • UV Ozone Cleaning
  • Processes
    • Deposition
      • Atomic Layer Deposition (ALD)
      • Anode PECVD
      • Cathode PECVD
    • Etching
      • Atomic Layer Etching (ALE)
      • Compound Semiconductor Etching
        • GaN Etching
        • GaAs Etching
        • InP Etching
      • Silicon Etching & DRIE
      • Metal/Dielectric Etching
      • Failure Analysis
    • Surface Treatment
      • Aqua Plasma®
      • Plasma Cleaning
      • UV Ozone Cleaning
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2026

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  2. 2026

Discussion during the visit to ITRI, Taiwan (From left: Osamu Tsuji, Chairman, Samco Inc.; Pei-Zen Chang, President, ITRI; Jwu-Sheng Hu, Executive Vice President, ITRI)

Samco Strengthens Strategic Collaboration with ITRI Taiwan

NewsBy MeganFebruary 10, 2026

Samco expands partnership with ITRI Taiwan, focusing on semiconductor processing, silicon photonics, and chiplet integration through joint R&D efforts.

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