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    • Deposition Systems
      • Atomic Layer Deposition (ALD)
      • Anode PECVD
      • Cathode PECVD
    • Etching Systems
      • Atomic Layer Etching (ALE)
      • Inductively Coupled Plasma (ICP) Etching
      • Si Deep Reactive Ion Etching (DRIE)
      • Reactive Ion Etching (RIE) – Plasma Etching
      • Xenon Difluoride (XeF2) Etching
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        • GaAs Etching
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2026

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  2. 2026

Headshot of Dr. Shigehito Miki, Deputy Director, Advanced ICT Device R&D Promotion Center, NICT

Superconductive ICT Device Lab (NICT): Shigehito Miki, Ph.D.

InterviewsBy MeganSeptember 1, 2026

Discover how superconducting nanostrip single-photon detectors are advancing quantum communication, computing, LiDAR, and deep-space research.

A 70% Reduction in Takt Time: Intro to Plasma CVD System PD-2201HLC

Technical reportsBy MeganAugust 21, 2026

New PD-2201HLC plasma CVD system cuts takt time by 70% while maintaining high deposition rates, film uniformity, and repeatability.

Samco’s 5,000th System to Support Open-Access Semiconductor Research at Tohoku University

NewsBy MeganAugust 12, 2026

Samco’s 5,000th system, an RIE-200NL etcher, will support open-access semiconductor and MEMS research and training at Tohoku University.

(Left) Yasuyuki Oze, Secretary General of the Kyoto Prefectural Branch of the Japanese Red Cross Society receives donation envelope from Osamu Tsuji, Founder and CEO of Samco Inc.; and Tsukasa Kawabe, President and COO of Samco Inc.

Samco Donates to the 2026 Venezuela Earthquake Relief Fund

NewsBy MeganJuly 29, 2026

Samco donated 10 million yen (approximately 60,000 USD) to the Japanese Red Cross Society’s 2026 Venezuela Earthquake Relief Fund to support relief and recovery efforts.

Talk with Samco at UGIM 2026 (The University/Government/Industry Micro/Nanotechnology Symposium 2026). July 19-22 @ Standford University Alumni Center, CA, USA.

Samco to Join UGIM 2026 at Stanford University

NewsBy MeganJuly 2, 2026

Samco Inc. will attend UGIM 2026 at Stanford University from July 19–22. Visit Samco at Table #1 to discuss plasma etching, ALE, PECVD, and surface treatment solutions for micro/nanofabrication facilities.

Red cross truck

Red Cross Blood Drive Held at Samco HQ

NewsBy MeganJune 11, 2026

Eighteen Samco employees participated in a blood donation drive at our Kyoto headquarters, helping maintain a stable blood supply for patients in need.

Visit Samco at ALD/ALE 2026, June 28 - July 1, 2026 at the JW Marriott Tampa Water Street, Tampa, Florida. See our poster presentation on June 29, 5:45 - 7:00 PM.

Samco Presents SiO₂ ALE Etch Stabilization Research at ALD/ALE 2026

NewsBy MeganJune 9, 2026

Samco Inc. will present a poster on SiO₂ quasi-ALE etch rate stability using O₂ plasma at ALD/ALE 2026 in Tampa, Florida.

Matthew Alexander talking during interview

Matthew – Supporting customers across the U.S.

TeamBy MeganJune 4, 2026

Meet Matthew Alexander, Program Manager at Samco’s U.S. branch, and learn about his career journey, team culture, and work supporting semiconductor R&D.

Cassette-loading etch system, RIE-800iPBC to be installed at DTU Nanolab to expand Si DRIE capabilities for micro- and nanofabrication.

DTU Nanolab Expands Silicon DRIE Infrastructure with Etch System

NewsBy MeganMay 26, 2026

DTU Nanolab, Denmark’s national nanofabrication facility, will expand its silicon DRIE infrastructure with Samco’s cassette-loading RIE-800iPBC system to support advanced MEMS, photonics, and microfabrication research.

Headshot of Professor Mikihiko Oogane (Tohoku University)

Tohoku University: Professor Mikihiko Oogane

InterviewsBy MeganMay 22, 2026

Professor Mikihiko Oogane discusses TMR sensors, quantum spintronics, and brain–information interfaces in magnetic sensing research at Tohoku University.

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