Samco Inc. has reached a major milestone with the sale of its 5,000th system. The milestone system, an RIE-200NL reactive ion etcher, will be installed at Tohoku University’s Hands-on-Access Fab, operated by the Micro System Integration Center (μSIC) at the Jun-ichi Nishizawa Memorial Research Center. Available to external users, the RIE-200NL will support the research and development of CMOS, MEMS sensors, their integrated devices, and photonics-electronics integration, as well as practical workforce training.
In connection with the shipment, Tsukasa Kawabe, President of Samco Inc., visited μSIC. He expressed company’s appreciation to Professor Kentaro Totsu, Director of the Center, and Associate Professor Masaaki Moriyama and presented them with a digital clock commemorating the 5,000-system milestone.
“Demand in the semiconductor field is growing not only for research and development but also for education and workforce development. With the RIE-200NL, we intend to explore fine etching, a new area for our facility, and apply it research and development involving CMOS circuits and MEMS sensors, as well as educational programs. Our facility receives samples in a wide range of sizes, from small chips to 8-inch wafers. Because the system can flexibly accommodate these different sizes, we expect it to be a user-friendly system capable of meeting the needs of a broad range of users.”
The Hands-on-Access Fab is one of Japan’s largest shared semiconductor and MEMS fabrication facilities. Its 1,800-square-meter cleanroom houses more than 150 semiconductor-related systems available for use by the hour. With support from experienced technical staff, users can draw on Tohoku University’s process technologies and prototyping expertise. Since beginning operations in 2010, the facility has served more than 400 organizations, including universities, research institutions, companies, and startups.
Through the provision of advanced processing systems, Samco will continue supporting semiconductor and MEMS research and the development of the next generation of engineers.
About Samco Inc.
Samco Inc. (TSE: 6387) stands for Semiconductor And Materials Company, is a leading manufacturer of processing equipment for the semiconductor and related industries. Founded in Kyoto, Japan in 1979 by Osamu Tsuji, Samco has nearly five decades of experience and has installed more than 5,000 systems worldwide. Its equipment and thin film technologies are widely adopted in the fabrication of semiconductor devices, including SiC/GaN power and RF devices, GaAs VCSELs, InP Laser Diodes, MEMS, BAW/SAW Filters, advanced packaging, and emerging quantum and photonic devices.
Learn more at https://www.samcointl.com/about/
Company Contacts:
TSUCHIHASHI, Atsushi
Public Relations
Phone: 81-75-621-7841
E-mail: tsuchihashi@samco.co.jp
DUNCAN, Megan
Public Relations
E-mail: megan.duncan@samco.co.jp