Samco Presents SiO₂ ALE Etch Stabilization Research at ALD/ALE 2026
Samco Inc. will present a poster on SiO₂ quasi-ALE etch rate stability using O₂ plasma at ALD/ALE 2026 in Tampa, Florida.
DTU Nanolab Expands Silicon DRIE Infrastructure with Etch System
DTU Nanolab, Denmark’s national nanofabrication facility, will expand its silicon DRIE infrastructure with Samco’s cassette-loading RIE-800iPBC system to support advanced MEMS, photonics, and microfabrication research.
Tohoku University: Professor Mikihiko Oogane
Professor Mikihiko Oogane discusses TMR sensors, quantum spintronics, and brain–information interfaces in magnetic sensing research at Tohoku University.
Samco Presents ALE Technologies at OneNano Mid-Atlantic Meeting
Samco presented ALE technologies at OneNano’s Spring Meredith Meeting, highlighting plasma-assisted etching for GaN HEMTs, diamond, and nanoscale devices.
Innovation Center of NanoMedicine (iCONM): Professor Kazunori Kataoka
Professor Kazunori Kataoka presents nanomachine-based drug delivery and the vision of “in-body hospitals” at the 2025 Samco Foundation lecture.
Kyushu Institute of Technology: Professor Akiyoshi Baba
Prof. Akiyoshi Baba shares insights on CMOS/MEMS research and managing Japan’s leading open-access semiconductor facility at Kyutech’s Iizuka Campus.
Special Lecture on GaN Technology by Nagoya University Professor Jun Suda
Professor Jun Suda of Nagoya University gave a special lecture at Samco on GaN devices, sharing insights on materials, processing, and future technologies.
Northwestern University – NUFAB: Nasir Basit, PhD.
Micro- and nanoscale device research, deposition and etching processes using RIE and PECVD for advanced structures.
Samco Inc. to Construct Third R&D Facility as Demand Surges for Innovative Semiconductor Equipment
Samco announces plans to build a third R&D facility near its Kyoto headquarters, expanding cleanroom capacity to accelerate semiconductor equipment innovation.