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    • Deposition Systems
      • Atomic Layer Deposition (ALD)
      • Anode PECVD
      • Cathode PECVD
    • Etching Systems
      • Atomic Layer Etching (ALE)
      • Inductively Coupled Plasma (ICP) Etching
      • Si Deep Reactive Ion Etching (DRIE)
      • Reactive Ion Etching (RIE) – Plasma Etching
      • Xenon Difluoride (XeF2) Etching
    • Surface Treatment Systems
      • Aqua Plasma®
      • Plasma Cleaning
      • UV Ozone Cleaning
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      • Atomic Layer Deposition (ALD)
      • Anode PECVD
      • Cathode PECVD
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      • Compound Semiconductor Etching
        • GaN Etching
        • GaAs Etching
        • InP Etching
      • Silicon Etching & DRIE
      • Metal/Dielectric Etching
      • Failure Analysis
    • Surface Treatment
      • Aqua Plasma®
      • Plasma Cleaning
      • UV Ozone Cleaning
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Tag Archives: ALE

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Samco Now 131 Technical Report: Atomic-Level Etch Control - Introduction to Atomic Layer Etching (ALE) Systems

Atomic Layer Etching Control – Intro to ALE Systems

Technical reportsBy MeganOctober 10, 2025

Introducing Samco’s Atomic Layer Etching (ALE) systems, detailing precise low-bias control and fast gas switching for uniform, low-damage etching processes.

University of Adelaide to Install RIE-400iP-ALE as Australia’s First ALE System

NewsBy MeganOctober 1, 2025

Samco’s RIE-400iP-ALE will become Australia’s first Atomic Layer Etching system, advancing III-V semiconductor and photonics research at the University of Adelaide.

MIT’s Dr. Tomás Palacios Visits Samco to Explore Future Microelectronics Innovations

NewsBy MeganMarch 24, 2025

MIT Professor Tomás Palacios visited Samco to discuss next-generation microelectronics, advanced materials, and potential research collaboration.

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