The Anode/Cathode Switching Function of Samco’s PECVD System PD-200STL
PECVD System PD-200STL with anode/cathode switching allows for multitude of deposition conditions and demonstrates versatility of applications.
Simultaneous Double-sided Wafer Deposition via Plasma Enhanced ALD
Report investigating simultaneous dual-surface deposition of AlOx films on silicon wafers using the Plasma Enhanced Atomic Layer Deposition (PEALD) technique.
Samco Inc. donates to the Red Cross Society
Samco Inc. donates 10 million JPY to the Japanese Red Cross Society, continuing its annual support for disaster relief and humanitarian efforts.
Ohio State University Students Visit Samco Inc. Headquarters
Samco welcomed Ohio State University students to Kyoto HQ. The students explored Samco’s history and learned about the semiconductor manufacturing field.