Process Data by Materials
SAMCO is a leading company of “Material Processing” for device fabrication and material research.
Check our material processing data which are achieved using our PECVD, dry etching and surface treatment technologies.
SAMCO has developed material processing technologies in collaboration and cooperation with various customers.
SAMCO regards research publication as fundamentals for further technology development in discussion with researchers.
Please check our publication on material processing in journals and conference proceedings.
GaN Power Devices
Recess Etching Process for AlGaN/GaN-HFET Devices Using In-Situ Monitoring
SiC Power Devices
Optimizing the SiC Plasma Etching Process for Manufacturing Power Devices
Through Silicon Via (TSV) Process Using DRIE and Cathode Coupled PE-CVD
High Brightness LEDs
Chlorine-Based ICP Etching for Improving the Luminance Efficiency in Nitride LEDs
Improvement of LED Luminance Efficiency by Sapphire Nano PSS Etching
Deposition and characterization of silicon carbon nitride films prepared by RF-PECVD with capacitive coupling
Empirical evidence for a two phase system in SiCN films prepared by low pressure PE-CVD
Polymer Surface Modification
UV/ozone Surface Modification for Long-term Stable Hydrophilic Surface of Polymer Microfluidic Devices