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  • Products
    • Deposition Systems
      • Atomic Layer Deposition (ALD)
      • Anode PECVD
      • Cathode PECVD
    • Etching Systems
      • Atomic Layer Etching (ALE)
      • Inductively Coupled Plasma (ICP) Etching
      • Si Deep Reactive Ion Etching (DRIE)
      • Reactive Ion Etching (RIE) – Plasma Etching
      • Xenon Difluoride (XeF2) Etching
    • Surface Treatment Systems
      • Aqua Plasma®
      • Plasma Cleaning
      • UV Ozone Cleaning
  • Processes
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      • Atomic Layer Deposition (ALD)
      • Anode PECVD
      • Cathode PECVD
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        • GaN Etching
        • GaAs Etching
        • InP Etching
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      • Metal/Dielectric Etching
      • Failure Analysis
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      • Aqua Plasma®
      • Plasma Cleaning
      • UV Ozone Cleaning
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Monthly Archives: May 2026

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  3. May

Cassette-loading etch system, RIE-800iPBC to be installed at DTU Nanolab to expand Si DRIE capabilities for micro- and nanofabrication.

DTU Nanolab Expands Silicon DRIE Infrastructure with Etch System

NewsBy MeganMay 26, 2026

DTU Nanolab, Denmark’s national nanofabrication facility, will expand its silicon DRIE infrastructure with Samco’s cassette-loading RIE-800iPBC system to support advanced MEMS, photonics, and microfabrication research.

Headshot of Professor Mikihiko Oogane (Tohoku University)

Tohoku University: Professor Mikihiko Oogane

InterviewsBy MeganMay 22, 2026

Professor Mikihiko Oogane discusses TMR sensors, quantum spintronics, and brain–information interfaces in magnetic sensing research at Tohoku University.

Dual-Chamber ALD System AD-8002LPC

Introduction to the Dual-Chamber ALD System AD-8002LPC

Technical reportsBy MeganMay 22, 2026

Samco’s AD-8002LPC dual-chamber ALD system enables stable TiOx deposition, reduced takt time, and flexible thermal and plasma ALD processing.

Commemorative group photo taken with University of Central Arkansas (UCA) students with Samco Founder and CEO Dr. Osamu Tsuji, during their visit to Samco on May 19th, 2026.

University of Central Arkansas Students Visit Samco Production Facility

NewsBy MeganMay 20, 2026

UCA students visit Samco to learn about semiconductors, plasma processing, Japanese business, and Samco’s founding story.

Samco's ALE talk at OneNano Meeting

Samco Presents ALE Technologies at OneNano Mid-Atlantic Meeting

NewsBy MeganMay 12, 2026

Samco presented ALE technologies at OneNano’s Spring Meredith Meeting, highlighting plasma-assisted etching for GaN HEMTs, diamond, and nanoscale devices.

CS MANTECH 2026

Samco to Exhibit at CS MANTECH 2026 in Portland

NewsBy MeganMay 5, 2026

Samco Inc. will exhibit at CS MANTECH 2026, taking place from May 18–21, 2026, at the Portland Marriott Downtown Waterfront in Portland, Oregon.

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