Kyushu University (I²CNER): Dr. Shigenori Fujikawa
Aqua Plasma® used for surface
modification of CO2 separation
nanomembranes.
Application of Aqua Plasma® for Microbumps
Samco’s Aqua Plasma® improves microbump fabrication by enhancing photoresist and Cu hydrophilization, preventing oxidation, and enabling better plating solution penetration for fine patterns.
