Hokkaido University: Professor Yasutaka Matsuo
Nano, micro-fabrication technology and materials development and thermal ALD for photochemistry.
Aqua Plasma Boost® and AQ-2000BT: Excellent for Reducing Large Sized Samples of Oxidized Copper
Samco developed Aqua Plasma Boost® to enhance oxidized copper reduction using reducing gas and water vapor.
Kyushu University (I²CNER): Dr. Shigenori Fujikawa
Aqua Plasma® used for surface
modification of CO2 separation
nanomembranes.
The University of Tokyo: Dr. Satoshi Iwamoto and Photonics Research
Topological, diamond, and quantum nanophotonics, redefining light control and driving next-generation photonic innovation.
Application of Aqua Plasma® for Microbumps
Samco’s Aqua Plasma® improves microbump fabrication by enhancing photoresist and Cu hydrophilization, preventing oxidation, and enabling better plating solution penetration for fine patterns.
New Approach for Trench Type SiC MOSFET
A new trench-type SiC MOSFET fabrication approach combining ICP dry etching and ALD/PECVD gate insulators for improved breakdown and device performance.