Samco Inc. (TSE: 6387), a leading manufacturer of semiconductor processing equipment, announced that its plasma etching system, the RIE-400iP, has been selected by the Technical University of Denmark (DTU) for advanced quantum photonics research. The system will be installed at DTU Nanolab, the university’s central nanofabrication facility, with shipment scheduled for mid-2026.
The RIE-400iP system will be used for etching of III-V semiconductor materials, with a particular focus on GaAs and AlGaAs. These material systems are central to DTU’s research on quantum photonic devices, including the development of single-photon sources for quantum computing and quantum communication applications. High-precision etching and careful control of surface quality are essential in these devices, as nanoscale variations can strongly influence optical performance.
“The introduction of a plasma etching system with atomic-scale process control is an important step for our quantum photonics research. Precise and low-damage etching of III-V materials such as GaAs and AlGaAs is critical for fabricating nanostructures used in single-photon sources. This system will strengthen our nanofabrication capabilities and support further advances in quantum device development.”
The system was selected following a competitive evaluation process, and system production has recently commenced. The RIE-400iP offers advanced plasma etching performance with atomic-scale process control, supporting highly reproducible fabrication of nanostructures required for quantum photonics research. The tool will complement DTU Nanolab’s existing nanofabrication infrastructure and further strengthen its capabilities in compound semiconductor processing.
“We are honored that DTU selected the RIE-400iP for this quantum photonics application,” said Tsukasa Kawabe, President and COO of Samco Inc. “Atomic-scale control during plasma etching is becoming increasingly important for III-V device fabrication, particularly in quantum and photonic applications where process precision directly impacts device performance. Samco remains committed to advancing plasma processing technologies that support cutting-edge research worldwide.”
DTU Nanolab serves as Denmark’s national nanofabrication facility, supporting a wide range of academic and industrial research in nanotechnology, photonics, microelectronics, and quantum devices. The installation of the RIE-400iP will further enhance the facility’s ability to support advanced III-V processing for emerging quantum technologies.
About DTU Nanolab
DTU Nanolab is the national nanofabrication facility of the Technical University of Denmark, providing cleanroom infrastructure and advanced processing tools for research in nanotechnology, microelectronics, photonics, and quantum devices. The facility supports both academic and industrial research projects and plays a central role in Denmark’s nanotechnology ecosystem. For more information, visit www.nanolab.dtu.dk.
About Samco Inc.
Samco Inc. (TSE: 6387) stands for Semiconductor And Materials Company, is a leading manufacturer of processing equipment for the semiconductor and related industries. Founded in Kyoto, Japan in 1979 by Osamu Tsuji, Samco has nearly five decades of experience and has installed more than 5,000 systems worldwide. Its equipment and thin film technologies are widely adopted in the fabrication of semiconductor devices, including SiC/GaN power and RF devices, GaAs VCSELs, InP Laser Diodes, MEMS, BAW/SAW Filters, advanced packaging, and emerging quantum and photonic devices.
Learn more at https://www.samcointl.com/about/
Read article published on Compound Semiconductor.
SOURCE Samco Inc.
Released March 2, 2026
Company Contacts:
TSUCHIHASHI, Atsushi
Public Relations
Phone: 81-75-621-7841
E-mail: tsuchihashi@samco.co.jp
DUNCAN, Megan
Public Relations
E-mail: megan.duncan@samco.co.jp