Samco Inc. (TSE: 6387), was honored to host Dr. Tomás Palacios, Director of the Microsystems Technology Laboratories at MIT and Clarence J. LeBel Professor in Electrical Engineering and Computer Science, during his visit to discuss potential collaborations in research and development. His visit marks an exciting opportunity to explore advancements in microelectronics through innovative materials, new device architectures, and advanced fabrication technologies.

During his visit to Samco’s headquarters in Kyoto, Japan, Dr. Tomás Palacios, MIT Professor, shared the following remarks:
“Throughout my entire career, I have been very fortunate to use many Samco tools...and they are really outstanding.”
Dr. Tomás Palacios, Director of the Microsystems Technology Laboratories at MIT and Clarence J. LeBel Professor in Electrical Engineering and Computer Science
Dr. Palacios also delivered a presentation titled “Extreme Materials and Devices to Define the Future of Microelectronics.” He highlighted key industry challenges, including rising chip costs, the exponential growth of data generation and storage, and increasing energy consumption. His research focuses on identifying novel materials and fabrication methods to address these challenges—an area where Samco’s expertise in compound semiconductors and non-silicon materials can play a crucial role.
Among the materials Dr. Palacios is currently researching are gallium nitride (GaN) and molybdenum disulfide (MoS2), which have significant potential for next-generation electronics and semiconductor applications. Additionally, his work aims to develop more energy-efficient technologies, helping to reduce power consumption in future electronic devices.

Dr. Palacios also expressed interest in Samco’s Atomic Layer Etching (ALE), Atomic Layer Deposition (ALD), and Aqua Plasma® systems, recognizing their potential for enabling next-generation microelectronic devices. Additionally, his research aligns with Samco’s low-temperature PECVD technology, which allows for the deposition of sensitive materials that may degrade or fail at higher processing temperatures. By leveraging low-temperature deposition techniques, the possibilities for innovation in microelectronics expand significantly.
This visit underscores Samco’s commitment to driving innovation in semiconductor manufacturing and materials research. The potential collaboration with MIT represents an exciting step toward developing cutting-edge equipment and technologies that will shape the future of microelectronics.

Samco Inc. Chairman Osamu Tsuji commented on the visit, stating,
“It is a great honor to welcome a distinguished professor from MIT to Samco. As a company at the forefront of the compound semiconductor industry, we see tremendous potential for collaboration with MIT. This visit marks an important step in strengthening our relationship, and I am proud of the opportunity to explore joint research efforts. Looking ahead, I hope to visit Boston regularly to foster deeper collaboration and drive innovation together.”
Osamu Tsuji, Samco Inc. Chairman
About Samco Inc.
Samco Inc. (TSE: 6387) stands for Semiconductor And Materials Company, is a leading manufacturer of processing equipment for the semiconductor and related industries founded by Mr. Osamu Tsuji in Kyoto, Japan in 1979. Over the past forty-six years, more than 4,700 Samco systems have been installed and used in 35 different countries. Its equipment and thin film technology are widely adopted in the fabrication of semiconductor devices, including SiC/GaN power/RF devices, GaAs VCSELs, InP Laser Diodes, MEMS, BAW/SAW Filters, TSVs, advanced packaging, and more.
Learn more at https://www.samcointl.com/about/
About MIT Microsystems Technology Laboratories (MTL)
The Microsystems Technology Laboratories (MTL) at the Massachusetts Institute of Technology (MIT) is a world-renowned research facility dedicated to advancing micro- and nano-scale technologies. MTL supports cutting-edge research in microelectronics, nanotechnology, photonics, and emerging materials, fostering collaboration between academia, industry, and government agencies. The laboratory plays a critical role in developing next-generation semiconductor technologies and innovative device applications.
Company Contacts:
TSUCHIHASHI, Atsushi
Public Relations
Phone: 81-75-621-7841
E-mail: tsuchihashi@samco.co.jp
DUNCAN, Megan
Public Relations
E-mail: megan.duncan@samco.co.jp