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  • Products
    • Deposition Systems
      • Atomic Layer Deposition (ALD)
      • Anode PECVD
      • Cathode PECVD
    • Etching Systems
      • Atomic Layer Etching (ALE)
      • Inductively Coupled Plasma (ICP) Etching
      • Si Deep Reactive Ion Etching (DRIE)
      • Reactive Ion Etching (RIE) – Plasma Etching
      • Xenon Difluoride (XeF2) Etching
    • Surface Treatment Systems
      • Aqua Plasma®
      • Plasma Cleaning
      • UV Ozone Cleaning
  • Processes
    • Deposition
      • Atomic Layer Deposition (ALD)
      • Anode PECVD
      • Cathode PECVD
    • Etching
      • Atomic Layer Etching (ALE)
      • Compound Semiconductor Etching
        • GaN Etching
        • GaAs Etching
        • InP Etching
      • Silicon Etching & DRIE
      • Metal/Dielectric Etching
      • Failure Analysis
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      • Aqua Plasma®
      • Plasma Cleaning
      • UV Ozone Cleaning
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Author Archives: Megan

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Samco Now 131 Technical Report: Atomic-Level Etch Control - Introduction to Atomic Layer Etching (ALE) Systems

Atomic Layer Etching Control – Intro to ALE Systems

Technical reportsBy MeganOctober 10, 2025

Introducing Samco’s Atomic Layer Etching (ALE) systems, detailing precise low-bias control and fast gas switching for uniform, low-damage etching processes.

Photo of Professor Akiyoshi Baba from Kyutech

Kyushu Institute of Technology: Professor Akiyoshi Baba

InterviewsBy MeganOctober 9, 2025

Prof. Akiyoshi Baba shares insights on CMOS/MEMS research and managing Japan’s leading open-access semiconductor facility at Kyutech’s Iizuka Campus.

University of Adelaide to Install RIE-400iP-ALE as Australia’s First ALE System

NewsBy MeganOctober 1, 2025

Samco’s RIE-400iP-ALE will become Australia’s first Atomic Layer Etching system, advancing III-V semiconductor and photonics research at the University of Adelaide.

Attendees of "4 Decades of Plasma CVD & ALD" Invited Lecture held by Osamu Tsuji at IIT Delhi

Invited Lecture at IIT Delhi Delivered by Samco Inc. Founder Osamu Tsuji

NewsBy MeganSeptember 13, 2025

Invited Lecture at IIT Delhi Delivered by Samco Inc. Founder Osamu Tsuji On September 1, 2025, Samco Inc.’s Chairman and CEO, Osamu Tsuji, delivered an invited lecture at the Indian Institute of Technology Delhi (IIT Delhi). Entitled “4 Decades of Plasma CVD & ALD,” the lecture was presented to students and faculty of the School…

Samco Inc. Completes Construction of New Advanced Technology Development Center

NewsBy MeganSeptember 1, 2025

Samco opens its new Advanced Technology Development Center in Kyoto, featuring a Class 1,000 cleanroom to drive next-gen semiconductor innovation.

Group photo of participants at Kyoto Day seminar in New Delhi on September 1, 2025. TOWA Chairman Hirokazu Okada (middle left) and Samco Chairman Osamu Tsuji (middle right) stand with staff, lecturers, and attendees behind a banner reading 'Kyoto Day: Japan’s Semiconductor Technology for India’s Manufacturing Future.'

TOWA and Samco Successfully Host “Kyoto Day” Technical Seminar in New Delhi

NewsBy MeganSeptember 1, 2025

TOWA and Samco co-hosted Kyoto Day in New Delhi, sharing Japan’s semiconductor innovations to support India’s growing semiconductor industry.

TOWA and Samco to Host “Kyoto Day” in New Delhi Ahead of SEMICON India 2025

NewsBy MeganAugust 28, 2025

Kyoto Day in New Delhi brings TOWA and Samco together to showcase semiconductor innovations ahead of SEMICON India 2025.

Group photo of CEO Osamu Tsuji with AJOU University students in front of Samco production building

AJOU University Students Visit Samco for Industry Insights

NewsBy MeganJuly 27, 2025

Ajou University students visit Samco for a hands-on look at semiconductor manufacturing and a Q&A session with CEO Osamu Tsuji during their Japan study tour.

Institute of Science Tokyo: Professor Yasuyuki Miyamoto

InterviewsBy MeganJuly 7, 2025

Advancing high-speed transistors with InP and GaN, Professor Yasuyuki Miyamoto explores the future of compound semiconductors and shares insights on Samco’s key role in research.

Special Lecture on GaN Technology by Nagoya University Professor Jun Suda

NewsBy MeganJune 17, 2025

Professor Jun Suda of Nagoya University gave a special lecture at Samco on GaN devices, sharing insights on materials, processing, and future technologies.

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