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    • Deposition Systems
      • Atomic Layer Deposition (ALD)
      • Anode PECVD
      • Cathode PECVD
    • Etching Systems
      • Atomic Layer Etching (ALE)
      • Inductively Coupled Plasma (ICP) Etching
      • Si Deep Reactive Ion Etching (DRIE)
      • Reactive Ion Etching (RIE) – Plasma Etching
      • Xenon Difluoride (XeF2) Etching
    • Surface Treatment Systems
      • Aqua Plasma®
      • Plasma Cleaning
      • UV Ozone Cleaning
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      • Atomic Layer Deposition (ALD)
      • Anode PECVD
      • Cathode PECVD
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      • Atomic Layer Etching (ALE)
      • Compound Semiconductor Etching
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        • GaAs Etching
        • InP Etching
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      • Failure Analysis
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Author Archives: Megan

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Technical Report

Stable Device Isolation Processing for 6-Inch GaN-Based Power Devices

Technical reportsBy MeganMarch 11, 2026

GaN device isolation etching using ICP-RIE and endpoint detection enables uniform processing and stable multi-wafer semiconductor production.

Professor Kataoka headshot

Innovation Center of NanoMedicine (iCONM): Professor Kazunori Kataoka

InterviewsBy MeganFebruary 26, 2026

Professor Kazunori Kataoka presents nanomachine-based drug delivery and the vision of “in-body hospitals” at the 2025 Samco Foundation lecture.

Chairman Osamu Tsuji Awarded Honorary Doctorate by Kyoto Institute of Technology

Chairman Osamu Tsuji Awarded Honorary Doctorate by Kyoto Institute of Technology

NewsBy MeganDecember 12, 2025

Samco Chairman Osamu Tsuji received an Honorary Doctorate from Kyoto Institute of Technology in recognition of his contributions to education and research.

Samco Now 131 Technical Report: Atomic-Level Etch Control - Introduction to Atomic Layer Etching (ALE) Systems

Atomic Layer Etching Control – Intro to ALE Systems

Technical reportsBy MeganOctober 10, 2025

Introducing Samco’s Atomic Layer Etching (ALE) systems, detailing precise low-bias control and fast gas switching for uniform, low-damage etching processes.

Photo of Professor Akiyoshi Baba from Kyutech

Kyushu Institute of Technology: Professor Akiyoshi Baba

InterviewsBy MeganOctober 9, 2025

Prof. Akiyoshi Baba shares insights on CMOS/MEMS research and managing Japan’s leading open-access semiconductor facility at Kyutech’s Iizuka Campus.

University of Adelaide to Install RIE-400iP-ALE as Australia’s First ALE System

NewsBy MeganOctober 1, 2025

Samco’s RIE-400iP-ALE will become Australia’s first Atomic Layer Etching system, advancing III-V semiconductor and photonics research at the University of Adelaide.

Attendees of "4 Decades of Plasma CVD & ALD" Invited Lecture held by Osamu Tsuji at IIT Delhi

Invited Lecture at IIT Delhi Delivered by Samco Inc. Founder Osamu Tsuji

NewsBy MeganSeptember 13, 2025

Samco founder Osamu Tsuji delivered an invited lecture at IIT Delhi on Plasma CVD, ALD, and the future of thin film technologies in semiconductor research.

Samco Inc. and IIT Delhi Commemorative Photo

Samco Signs MoU with IIT Delhi to Advance Academic and Research Collaboration

NewsBy MeganSeptember 3, 2025

Samco signs an MoU with IIT Delhi to expand academic and research collaboration, supporting technology exchange and joint initiatives in advanced engineering.

Samco Inc. Completes Construction of New Advanced Technology Development Center

NewsBy MeganSeptember 1, 2025

Samco opens its new Advanced Technology Development Center in Kyoto, featuring a Class 1,000 cleanroom to drive next-gen semiconductor innovation.

Group photo of participants at Kyoto Day seminar in New Delhi on September 1, 2025. TOWA Chairman Hirokazu Okada (middle left) and Samco Chairman Osamu Tsuji (middle right) stand with staff, lecturers, and attendees behind a banner reading 'Kyoto Day: Japan’s Semiconductor Technology for India’s Manufacturing Future.'

TOWA and Samco Successfully Host “Kyoto Day” Technical Seminar in New Delhi

NewsBy MeganSeptember 1, 2025

TOWA and Samco co-hosted Kyoto Day in New Delhi, sharing Japan’s semiconductor innovations to support India’s growing semiconductor industry.

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